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Book MORDA in the Semiconductor Industry: Modeling and Implementation of a System for Multivariate Offline Raw Data Analysis (MORDA) in the Semiconductor Industry

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MORDA in the Semiconductor Industry: Modeling and Implementation of a System for Multivariate Offline Raw Data Analysis (MORDA) in the Semiconductor Industry

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    Available in PDF - DJVU Format | MORDA in the Semiconductor Industry: Modeling and Implementation of a System for Multivariate Offline Raw Data Analysis (MORDA) in the Semiconductor Industry.pdf | Language: English
    Uwe B¿¿ttner(Author)

    Book details


In the course of a feasibility study at the FEOL of the 300 mm semiconductor Fab of Qimonda Dresden, a system for multivariate analysis of time-resolved raw data originating from wafer processing tools was instituted. This system called MORDA (Multivariate Offline Raw Data Analysis) closed the gap between online Fault Detection and Classification basing on statistical key numbers, and offline PCA, PLS and Batch Modelling to diagnose and classify the root causes of Low Yielding Wafers that could not be explained by classical FDC.

Uwe B¿¿ttner, born 1976 in Mei¿¿en (Germany), obtained his diploma thesis in computer science at the Dresden university of technology in 2006. He is currently working as a production engineer at the 300 mm wafer fab of Qimonda Dresden in the LPCVD furnace area. He is also responsible for automation and other IT related production topics.

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Book details

  • PDF | 92 pages
  • Uwe B¿¿ttner(Author)
  • VDM Verlag (August 26, 2008)
  • English
  • 2
  • Engineering & Transportation

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